Solventless grafting of functional polymer coatings onto Parylene C
نویسندگان
چکیده
منابع مشابه
Characterization of Biocompatible Parylene-C Coatings for BIOMEMS Applications
Biological Micro-Electro-Mechanical Systems (BioMEMS) is one of the forefronts of research for adapting MEMS to meet demands for biological applications. The immense popularity of BioMEMS lies in the promise of rapid, accurate diagnostic results while requiring an exponentially lower sample volume which are achieved by replicating laboratory functionalities onto packaged miniaturized devices. T...
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ژورنال
عنوان ژورنال: Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films
سال: 2016
ISSN: 0734-2101,1520-8559
DOI: 10.1116/1.4953876